Thin Body III–V-Semiconductor-on-Insulator Metal–Oxide–Semiconductor Field-Effect Transistors on Si Fabricated Using Direct Wafer Bonding

Published 2009 View Full Article

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Title
Thin Body III–V-Semiconductor-on-Insulator Metal–Oxide–Semiconductor Field-Effect Transistors on Si Fabricated Using Direct Wafer Bonding
Authors
Keywords
-
Journal
Applied Physics Express
Volume 2, Issue 12, Pages 124501
Publisher
IOP Publishing
Online
2009-12-11
DOI
10.1143/apex.2.124501

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