Three-dimensional imaging of pore structures inside low-κ dielectrics

Published 2010 View Full Article

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Title
Three-dimensional imaging of pore structures inside low-κ dielectrics
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 22, Pages 223108
Publisher
AIP Publishing
Online
2010-06-04
DOI
10.1063/1.3442496
References
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