Three-dimensional imaging of pore structures inside low-κ dielectrics

标题
Three-dimensional imaging of pore structures inside low-κ dielectrics
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 96, Issue 22, Pages 223108
出版商
AIP Publishing
发表日期
2010-06-04
DOI
10.1063/1.3442496

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