In situ evolution of stress gradients in Cu films induced by capping layers

Published 2010 View Full Article

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Title
In situ evolution of stress gradients in Cu films induced by capping layers
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 26, Pages 261903
Publisher
AIP Publishing
Online
2010-06-30
DOI
10.1063/1.3458864
References
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