Stress gradients observed in Cu thin films induced by capping layers

Published 2010 View Full Article

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Title
Stress gradients observed in Cu thin films induced by capping layers
Authors
Keywords
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Journal
JOURNAL OF MATERIALS RESEARCH
Volume 25, Issue 04, Pages 622-628
Publisher
Cambridge University Press (CUP)
Online
2010-03-26
DOI
10.1557/jmr.2010.0102

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