Low-voltage InGaZnO thin-film transistors with Al2O3 gate insulator grown by atomic layer deposition

Published 2009 View Full Article

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Title
Low-voltage InGaZnO thin-film transistors with Al2O3 gate insulator grown by atomic layer deposition
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 14, Pages 142107
Publisher
AIP Publishing
Online
2009-04-11
DOI
10.1063/1.3118575
References
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