Effects of nitrogen incorporation on the interfacial layer between thermally grown dielectric films and SiC

Published 2009 View Full Article

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Title
Effects of nitrogen incorporation on the interfacial layer between thermally grown dielectric films and SiC
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 25, Pages 251909
Publisher
AIP Publishing
Online
2009-06-27
DOI
10.1063/1.3159812
References
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