Presence and Resistance to Wet Etching of Silicon Oxycarbides at the SiO[sub 2]/SiC Interface

Published 2008 View Full Article

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Title
Presence and Resistance to Wet Etching of Silicon Oxycarbides at the SiO[sub 2]/SiC Interface
Authors
Keywords
-
Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 11, Issue 9, Pages H258
Publisher
The Electrochemical Society
Online
2008-07-23
DOI
10.1149/1.2949117

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