Change of the trap energy levels of the atomic layer deposited HfLaOx films with different La concentration

标题
Change of the trap energy levels of the atomic layer deposited HfLaOx films with different La concentration
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 94, Issue 26, Pages 262901
出版商
AIP Publishing
发表日期
2009-07-01
DOI
10.1063/1.3159625

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