Effect of thermal annealing on charge exchange between oxygen interstitial defects within HfO2 and oxygen-deficient silicon centers within the SiO2/Si interface

Title
Effect of thermal annealing on charge exchange between oxygen interstitial defects within HfO2 and oxygen-deficient silicon centers within the SiO2/Si interface
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 16, Pages 162907
Publisher
AIP Publishing
Online
2009-04-25
DOI
10.1063/1.3122925

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