Atomic mechanism of flat-band voltage shifts by La2O3 and Al2O3 in gate stacks

Title
Atomic mechanism of flat-band voltage shifts by La2O3 and Al2O3 in gate stacks
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 1, Pages 012906
Publisher
AIP Publishing
Online
2009-07-09
DOI
10.1063/1.3173814

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