Pulsed metal-organic chemical vapor deposition of high-quality AlN/GaN superlattices for near-infrared intersubband transitions

Title
Pulsed metal-organic chemical vapor deposition of high-quality AlN/GaN superlattices for near-infrared intersubband transitions
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 12, Pages 121902
Publisher
AIP Publishing
Online
2009-03-24
DOI
10.1063/1.3104857

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