High quality nitride based microdisks obtained via selective wet etching of AlInN sacrificial layers

Published 2008 View Full Article

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Title
High quality nitride based microdisks obtained via selective wet etching of AlInN sacrificial layers
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 17, Pages 171102
Publisher
AIP Publishing
Online
2008-04-29
DOI
10.1063/1.2917452

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