High quality nitride based microdisks obtained via selective wet etching of AlInN sacrificial layers

标题
High quality nitride based microdisks obtained via selective wet etching of AlInN sacrificial layers
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 92, Issue 17, Pages 171102
出版商
AIP Publishing
发表日期
2008-04-29
DOI
10.1063/1.2917452

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