The effect of aluminum oxide incorporation on the material and electrical properties of hafnium oxide on Ge

Published 2008 View Full Article

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Title
The effect of aluminum oxide incorporation on the material and electrical properties of hafnium oxide on Ge
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 23, Pages 233501
Publisher
AIP Publishing
Online
2008-12-10
DOI
10.1063/1.3040311
References
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