The effect of aluminum oxide incorporation on the material and electrical properties of hafnium oxide on Ge

标题
The effect of aluminum oxide incorporation on the material and electrical properties of hafnium oxide on Ge
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 93, Issue 23, Pages 233501
出版商
AIP Publishing
发表日期
2008-12-10
DOI
10.1063/1.3040311

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