Fabrication of submicron structures in nanoparticle/polymer composite by holographic lithography and reactive ion etching

Published 2008 View Full Article

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Title
Fabrication of submicron structures in nanoparticle/polymer composite by holographic lithography and reactive ion etching
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 20, Pages 203509
Publisher
AIP Publishing
Online
2008-11-21
DOI
10.1063/1.2998541
References
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