Performance comparison of Pb(Zr0.52Ti0.48)O3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators

标题
Performance comparison of Pb(Zr0.52Ti0.48)O3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 93, Issue 23, Pages 233504
出版商
AIP Publishing
发表日期
2008-12-12
DOI
10.1063/1.3046717

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