Nanopore processing in dielectric materials and dielectric template-assisted nanoarray synthesis: Using pulsed bias to enhance process throughput and precision

Title
Nanopore processing in dielectric materials and dielectric template-assisted nanoarray synthesis: Using pulsed bias to enhance process throughput and precision
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 22, Pages 223104
Publisher
AIP Publishing
Online
2008-06-04
DOI
10.1063/1.2928219

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