Nanosphere monolayer-templated, ion-assisted nanofeature etching in dielectric materials: a numerical simulation of nanoscale ion flux topography

Published 2008 View Full Article

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Title
Nanosphere monolayer-templated, ion-assisted nanofeature etching in dielectric materials: a numerical simulation of nanoscale ion flux topography
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 15, Pages 155304
Publisher
IOP Publishing
Online
2008-03-12
DOI
10.1088/0957-4484/19/15/155304

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