Effects of Thermal Treatments on the Trapping Properties of HfO$_{2}$ Films for Charge Trap Memories

Title
Effects of Thermal Treatments on the Trapping Properties of HfO$_{2}$ Films for Charge Trap Memories
Authors
Keywords
-
Journal
Applied Physics Express
Volume 5, Issue 2, Pages 021102
Publisher
IOP Publishing
Online
2012-01-27
DOI
10.1143/apex.5.021102

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