Effects of Thermal Treatments on the Trapping Properties of HfO$_{2}$ Films for Charge Trap Memories

标题
Effects of Thermal Treatments on the Trapping Properties of HfO$_{2}$ Films for Charge Trap Memories
作者
关键词
-
出版物
Applied Physics Express
Volume 5, Issue 2, Pages 021102
出版商
IOP Publishing
发表日期
2012-01-27
DOI
10.1143/apex.5.021102

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