Effects of Substrate Heating on the Amorphous Structure of InGaZnO Films and the Electrical Properties of Their Thin Film Transistors

Published 2010 View Full Article

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Title
Effects of Substrate Heating on the Amorphous Structure of InGaZnO Films and the Electrical Properties of Their Thin Film Transistors
Authors
Keywords
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Journal
Applied Physics Express
Volume 3, Issue 11, Pages 111101
Publisher
IOP Publishing
Online
2010-11-12
DOI
10.1143/apex.3.111101

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