Effects of Substrate Heating on the Amorphous Structure of InGaZnO Films and the Electrical Properties of Their Thin Film Transistors

标题
Effects of Substrate Heating on the Amorphous Structure of InGaZnO Films and the Electrical Properties of Their Thin Film Transistors
作者
关键词
-
出版物
Applied Physics Express
Volume 3, Issue 11, Pages 111101
出版商
IOP Publishing
发表日期
2010-11-12
DOI
10.1143/apex.3.111101

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