Enhanced resputtering and asymmetric interface mixing in W/Si multilayers

Published 2013 View Full Article

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Title
Enhanced resputtering and asymmetric interface mixing in W/Si multilayers
Authors
Keywords
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Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 111, Issue 2, Pages 431-437
Publisher
Springer Nature
Online
2013-01-29
DOI
10.1007/s00339-013-7587-5
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