The performances of silicon solar cell with core–shell p-n junctions of micro-nano pillars fabricated by cesium chloride self-assembly and dry etching

Title
The performances of silicon solar cell with core–shell p-n junctions of micro-nano pillars fabricated by cesium chloride self-assembly and dry etching
Authors
Keywords
Solar Cell, PMMA, Inductively Couple Plasma, CsCl, Junction Depth
Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 114, Issue 4, Pages 1175-1179
Publisher
Springer Nature
Online
2013-05-14
DOI
10.1007/s00339-013-7743-y

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