Detection of buried layers in silicon devices using LIBS during hole drilling with femtosecond laser pulses

Evolution of hole depth and shape in ultrashort pulse deep drilling in silicon

(2011) S. Döring et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Femtosecond laser drilling of high-aspect ratio microchannels in glass

(2011) Xin Zhao et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Melt Dynamics and Hole Formation during Drilling with Ultrashort Pulses

(2010) Andreas Michalowski   Journal of Laser Micro Nanoengineering

In situ imaging of hole shape evolution in ultrashort pulse laser drilling

(2010) Sven Döring et al.   OPTICS EXPRESS

Numerical modeling of ultrashort-pulse laser ablation of silicon

(2009) D.P. Korfiatis et al.   APPLIED SURFACE SCIENCE

High speed laser drilling of metals using a high repetition rate, high average power ultrafast fiber CPA system

(2008) A. Ancona et al.   OPTICS EXPRESS

Femtosecond laser micromilling of Si wafers

(2007) Seongkuk Lee et al.   APPLIED SURFACE SCIENCE