Correlation of plume dynamics and oxygen pressure with VO2 stoichiometry during pulsed laser deposition

Title
Correlation of plume dynamics and oxygen pressure with VO2 stoichiometry during pulsed laser deposition
Authors
Keywords
Oxygen Pressure, Vanadium Oxide, Vanadium Dioxide, Oxygen Incorporation, Deposition Distance
Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 112, Issue 1, Pages 159-164
Publisher
Springer Nature
Online
2012-09-06
DOI
10.1007/s00339-012-7223-9

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