Transmission electron microscopy investigation of crystalline silicon surface irradiated by femtosecond laser pulses in different background atmospheres

Title
Transmission electron microscopy investigation of crystalline silicon surface irradiated by femtosecond laser pulses in different background atmospheres
Authors
Keywords
-
Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 109, Issue 3, Pages 635-641
Publisher
Springer Nature
Online
2012-08-01
DOI
10.1007/s00339-012-7082-4

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