Laser cutting of silicon with the liquid jet guided laser using a chlorine-containing jet media

Published 2010 View Full Article

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Title
Laser cutting of silicon with the liquid jet guided laser using a chlorine-containing jet media
Authors
Keywords
-
Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 102, Issue 3, Pages 621-627
Publisher
Springer Nature
Online
2010-12-16
DOI
10.1007/s00339-010-6155-5
References
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