Size parameter effect of dielectric small particle mediated nano-hole patterning on silicon wafer by femtosecond laser

Published 2010 View Full Article

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Title
Size parameter effect of dielectric small particle mediated nano-hole patterning on silicon wafer by femtosecond laser
Authors
Keywords
-
Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 99, Issue 1, Pages 39-46
Publisher
Springer Nature
Online
2010-02-09
DOI
10.1007/s00339-010-5576-5

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