Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 98, Issue 4, Pages 855-860Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s00339-010-5552-0
Keywords
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Funding
- US Department of Energy [DE-FE0001127]
- National Natural Science Foundation of China [90923039]
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This article demonstrates an efficient approach to fabricate nanoparticles arranged in a periodic pattern over a large area. A nanoscale gold film coated on a silicon wafer substrate was sectioned into grids by focused ion beam machining. Through a thermal treatment, the film in a confined area transforms into a nanoparticle due to the surface tension effect of the melted gold film. By controlling the film thickness and the size of the confined area, a nanoparticle array with various particle sizes and interparticle spacings can be manipulated. This approach may have great potential applications in sensor chips and nonlinear devices.
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