Aluminum-enhanced sharpening of silicon nanocones

Title
Aluminum-enhanced sharpening of silicon nanocones
Authors
Keywords
-
Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 99, Issue 4, Pages 705-709
Publisher
Springer Nature
Online
2010-05-11
DOI
10.1007/s00339-010-5751-8

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