Optical properties of molybdenum oxide thin films deposited by chemical vapor transport of MoO3(OH)2

MoO3 thin films are useful for optical devices due to their electrochromic properties. In this study, deposition of MoO2 thin films was successfully accomplished by chemical vapor transport (CVT) of volatile MoO3(OH)(2). Subsequently, a MoO3 thin film was obtained by annealing of the deposited MoO2 at 400A degrees C in an O-2 atmosphere. As annealing commenced, the optical transmittance of the films increased and their absorbance peaks were broadened and red-shifted due to reduced oxygen vacancy. Thus, the molybdenum oxide thin films can successfully be deposited using the CVT technique.