High-resolution analytical electron microscopy of catalytically etched silicon nanowires

Published 2009 View Full Article

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Title
High-resolution analytical electron microscopy of catalytically etched silicon nanowires
Authors
Keywords
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Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 95, Issue 2, Pages 325-327
Publisher
Springer Nature
Online
2009-01-20
DOI
10.1007/s00339-009-5101-x

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