TiO2 microstructures by inversion of macroporous silicon using atomic layer deposition

Published 2008 View Full Article

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Title
TiO2 microstructures by inversion of macroporous silicon using atomic layer deposition
Authors
Keywords
-
Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 93, Issue 2, Pages 399-403
Publisher
Springer Nature
Online
2008-07-05
DOI
10.1007/s00339-008-4784-8

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