Imaging and spectroscopy of defects in semiconductors using aberration-corrected STEM

Published 2008 View Full Article

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Title
Imaging and spectroscopy of defects in semiconductors using aberration-corrected STEM
Authors
Keywords
-
Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 96, Issue 1, Pages 161-169
Publisher
Springer Nature
Online
2008-12-10
DOI
10.1007/s00339-008-4979-z

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