A mathematical programming approach for optimizing control plans in semiconductor manufacturing

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Title
A mathematical programming approach for optimizing control plans in semiconductor manufacturing
Authors
Keywords
Control plan, Semiconductor manufacturing, Dynamic sampling, Risk, Defectivity, Integer linear programming
Journal
INTERNATIONAL JOURNAL OF PRODUCTION ECONOMICS
Volume 160, Issue -, Pages 213-219
Publisher
Elsevier BV
Online
2014-11-17
DOI
10.1016/j.ijpe.2014.11.004

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