A mathematical programming approach for optimizing control plans in semiconductor manufacturing

出版年份 2015 全文链接

标题

作者

关键词

Control plan, Semiconductor manufacturing, Dynamic sampling, Risk, Defectivity, Integer linear programming

出版物

Volume 160, Issue -, Pages 213-219

出版商

Elsevier BV

发表日期

2014-11-17

DOI

10.1016/j.ijpe.2014.11.004

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