Whole Air Canister Sampling Coupled with Preconcentration GC/MS Analysis of Part-per-Trillion Levels of Trimethylsilanol in Semiconductor Cleanroom Air

Title
Whole Air Canister Sampling Coupled with Preconcentration GC/MS Analysis of Part-per-Trillion Levels of Trimethylsilanol in Semiconductor Cleanroom Air
Authors
Keywords
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Journal
ANALYTICAL CHEMISTRY
Volume 85, Issue 16, Pages 7882-7888
Publisher
American Chemical Society (ACS)
Online
2013-07-23
DOI
10.1021/ac401522p

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