Enhanced deposition of ZnO films by Li doping using radio frequency reactive magnetron sputtering

Title
Enhanced deposition of ZnO films by Li doping using radio frequency reactive magnetron sputtering
Authors
Keywords
zinc oxide, thin films, doping, deposition, magnetron sputtering
Journal
Publisher
Springer Nature
Online
2015-09-29
DOI
10.1007/s12613-015-1174-z

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