Hierarchically Ordered Arrays of Noncircular Silicon Nanowires Featured by Holographic Lithography Toward a High-Fidelity Sensing Platform
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Title
Hierarchically Ordered Arrays of Noncircular Silicon Nanowires Featured by Holographic Lithography Toward a High-Fidelity Sensing Platform
Authors
Keywords
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Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 22, Issue 20, Pages 4268-4274
Publisher
Wiley
Online
2012-06-18
DOI
10.1002/adfm.201200921
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