Fabrication of 10 nm-Scale Complex 3D Nanopatterns with Multiple Shapes and Components by Secondary Sputtering Phenomenon

Published 2014 View Full Article

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Title
Fabrication of 10 nm-Scale Complex 3D Nanopatterns with Multiple Shapes and Components by Secondary Sputtering Phenomenon
Authors
Keywords
-
Journal
ACS Nano
Volume 8, Issue 2, Pages 1204-1212
Publisher
American Chemical Society (ACS)
Online
2014-01-09
DOI
10.1021/nn4037688

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