Fabrication of 10 nm-Scale Complex 3D Nanopatterns with Multiple Shapes and Components by Secondary Sputtering Phenomenon

标题
Fabrication of 10 nm-Scale Complex 3D Nanopatterns with Multiple Shapes and Components by Secondary Sputtering Phenomenon
作者
关键词
-
出版物
ACS Nano
Volume 8, Issue 2, Pages 1204-1212
出版商
American Chemical Society (ACS)
发表日期
2014-01-09
DOI
10.1021/nn4037688

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