Controlling the Al-Doping Profile and Accompanying Electrical Properties of Rutile-Phased TiO2 Thin Films

Title
Controlling the Al-Doping Profile and Accompanying Electrical Properties of Rutile-Phased TiO2 Thin Films
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 6, Issue 10, Pages 7910-7917
Publisher
American Chemical Society (ACS)
Online
2014-04-22
DOI
10.1021/am501247u

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