Conformal Polymeric Thin Films by Low-Temperature Rapid Initiated Chemical Vapor Deposition (iCVD) Using tert-Butyl Peroxybenzoate as an Initiator

Published 2011 View Full Article

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Title
Conformal Polymeric Thin Films by Low-Temperature Rapid Initiated Chemical Vapor Deposition (iCVD) Using tert-Butyl Peroxybenzoate as an Initiator
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 3, Issue 7, Pages 2410-2416
Publisher
American Chemical Society (ACS)
Online
2011-06-07
DOI
10.1021/am200322k

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