Conformal Polymeric Thin Films by Low-Temperature Rapid Initiated Chemical Vapor Deposition (iCVD) Using tert-Butyl Peroxybenzoate as an Initiator

标题
Conformal Polymeric Thin Films by Low-Temperature Rapid Initiated Chemical Vapor Deposition (iCVD) Using tert-Butyl Peroxybenzoate as an Initiator
作者
关键词
-
出版物
ACS Applied Materials & Interfaces
Volume 3, Issue 7, Pages 2410-2416
出版商
American Chemical Society (ACS)
发表日期
2011-06-07
DOI
10.1021/am200322k

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