Effect of Stress and Temperature on the Optical Properties of Silicon Nitride Membranes at 1,550 nm
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Title
Effect of Stress and Temperature on the Optical Properties of Silicon Nitride Membranes at 1,550 nm
Authors
Keywords
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Journal
Frontiers in Materials
Volume 5, Issue -, Pages -
Publisher
Frontiers Media SA
Online
2018-01-31
DOI
10.3389/fmats.2018.00001
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