Effect of Stress and Temperature on the Optical Properties of Silicon Nitride Membranes at 1,550 nm

标题
Effect of Stress and Temperature on the Optical Properties of Silicon Nitride Membranes at 1,550 nm
作者
关键词
-
出版物
Frontiers in Materials
Volume 5, Issue -, Pages -
出版商
Frontiers Media SA
发表日期
2018-01-31
DOI
10.3389/fmats.2018.00001

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