Multiscale and Uniform Liquid Metal Thin-Film Patterning Based on Soft Lithography for 3D Heterogeneous Integrated Soft Microsystems: Additive Stamping and Subtractive Reverse Stamping
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Title
Multiscale and Uniform Liquid Metal Thin-Film Patterning Based on Soft Lithography for 3D Heterogeneous Integrated Soft Microsystems: Additive Stamping and Subtractive Reverse Stamping
Authors
Keywords
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Journal
Advanced Materials Technologies
Volume 3, Issue 7, Pages 1800061
Publisher
Wiley
Online
2018-05-18
DOI
10.1002/admt.201800061
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